diff --git a/src/compiler/sys.ts b/src/compiler/sys.ts
index c0ab1065755..2b38e36f96a 100644
--- a/src/compiler/sys.ts
+++ b/src/compiler/sys.ts
@@ -1081,7 +1081,7 @@ namespace ts {
             let lastDirectoryPartWithDirectorySeparator: string | undefined;
             let lastDirectoryPart: string | undefined;
             if (inodeWatching) {
-                lastDirectoryPartWithDirectorySeparator = fileOrDirectory.substr(fileOrDirectory.lastIndexOf(directorySeparator));
+                lastDirectoryPartWithDirectorySeparator = fileOrDirectory.substring(fileOrDirectory.lastIndexOf(directorySeparator));
                 lastDirectoryPart = lastDirectoryPartWithDirectorySeparator.slice(directorySeparator.length);
             }
             /** Watcher for the file system entry depending on whether it is missing or present */
@@ -1140,13 +1140,14 @@ namespace ts {
             }
 
             function callbackChangingToMissingFileSystemEntry(event: "rename" | "change", relativeName: string | undefined) {
+                if (relativeName && endsWith(relativeName, "~")) relativeName = relativeName.slice(0, relativeName.length - 1);
                 callback(event, relativeName);
                 // because relativeName is not guaranteed to be correct we need to check on each rename with few combinations
                 // Eg on ubuntu while watching app/node_modules the relativeName is "node_modules" which is neither relative nor full path
                 if (event === "rename" &&
                     (!relativeName ||
                         relativeName === lastDirectoryPart ||
-                        (relativeName.lastIndexOf(lastDirectoryPartWithDirectorySeparator!) !== -1 && relativeName.lastIndexOf(lastDirectoryPartWithDirectorySeparator!) === relativeName.length - lastDirectoryPartWithDirectorySeparator!.length))) {
+                        endsWith(relativeName, lastDirectoryPartWithDirectorySeparator!))) {
                     if (inodeWatching) {
                         updateWatcher(!fileSystemEntryExists(fileOrDirectory, entryKind) ? watchMissingFileSystemEntry : watchPresentFileSystemEntry);
                     }
diff --git a/src/testRunner/unittests/tscWatch/watchEnvironment.ts b/src/testRunner/unittests/tscWatch/watchEnvironment.ts
index 8eee88bae65..95cacc1e7d0 100644
--- a/src/testRunner/unittests/tscWatch/watchEnvironment.ts
+++ b/src/testRunner/unittests/tscWatch/watchEnvironment.ts
@@ -668,12 +668,12 @@ namespace ts.tscWatch {
                     {
                         caption: "Replace file with rename event that introduces error",
                         change: sys => sys.modifyFile(`${projectRoot}/foo.d.ts`, `export function foo2(): string;`, { invokeFileDeleteCreateAsPartInsteadOfChange: true, useTildeAsSuffixInRenameEventFileName: true }),
-                        timeouts: sys => sys.checkTimeoutQueueLengthAndRun(1),
+                        timeouts: sys => sys.checkTimeoutQueueLengthAndRun(2),
                     },
                     {
                         caption: "Replace file with rename event that fixes error",
                         change: sys => sys.modifyFile(`${projectRoot}/foo.d.ts`, `export function foo(): string;`, { invokeFileDeleteCreateAsPartInsteadOfChange: true, useTildeAsSuffixInRenameEventFileName: true }),
-                        timeouts: sys => sys.checkTimeoutQueueLengthAndRun(0),
+                        timeouts: sys => sys.checkTimeoutQueueLengthAndRun(2),
                     },
                 ]
             });
diff --git a/tests/baselines/reference/tscWatch/watchEnvironment/fsWatch/when-using-file-watching-thats-on-inode-when-rename-event-ends-with-tilde.js b/tests/baselines/reference/tscWatch/watchEnvironment/fsWatch/when-using-file-watching-thats-on-inode-when-rename-event-ends-with-tilde.js
index 91667a046e0..534e0e71614 100644
--- a/tests/baselines/reference/tscWatch/watchEnvironment/fsWatch/when-using-file-watching-thats-on-inode-when-rename-event-ends-with-tilde.js
+++ b/tests/baselines/reference/tscWatch/watchEnvironment/fsWatch/when-using-file-watching-thats-on-inode-when-rename-event-ends-with-tilde.js
@@ -102,10 +102,21 @@ Output::
 FileWatcher:: Triggered with /user/username/projects/myproject/foo.d.ts 2:: WatchInfo: /user/username/projects/myproject/foo.d.ts 250 {"watchFile":4} Source file
 Scheduling update
 Elapsed:: *ms FileWatcher:: Triggered with /user/username/projects/myproject/foo.d.ts 2:: WatchInfo: /user/username/projects/myproject/foo.d.ts 250 {"watchFile":4} Source file
-DirectoryWatcher:: Triggered with /user/username/projects/myproject/foo.d.ts~ :: WatchInfo: /user/username/projects/myproject 0 {"watchFile":4} Failed Lookup Locations
-Elapsed:: *ms DirectoryWatcher:: Triggered with /user/username/projects/myproject/foo.d.ts~ :: WatchInfo: /user/username/projects/myproject 0 {"watchFile":4} Failed Lookup Locations
-DirectoryWatcher:: Triggered with /user/username/projects/myproject/foo.d.ts~ :: WatchInfo: /user/username/projects/myproject 0 {"watchFile":4} Failed Lookup Locations
-Elapsed:: *ms DirectoryWatcher:: Triggered with /user/username/projects/myproject/foo.d.ts~ :: WatchInfo: /user/username/projects/myproject 0 {"watchFile":4} Failed Lookup Locations
+sysLog:: /user/username/projects/myproject/foo.d.ts:: Changing watcher to MissingFileSystemEntryWatcher
+DirectoryWatcher:: Triggered with /user/username/projects/myproject/foo.d.ts :: WatchInfo: /user/username/projects/myproject 0 {"watchFile":4} Failed Lookup Locations
+Scheduling invalidateFailedLookup
+Elapsed:: *ms DirectoryWatcher:: Triggered with /user/username/projects/myproject/foo.d.ts :: WatchInfo: /user/username/projects/myproject 0 {"watchFile":4} Failed Lookup Locations
+FileWatcher:: Triggered with /user/username/projects/myproject/foo.d.ts 0:: WatchInfo: /user/username/projects/myproject/foo.d.ts 250 {"watchFile":4} Source file
+Scheduling update
+Elapsed:: *ms FileWatcher:: Triggered with /user/username/projects/myproject/foo.d.ts 0:: WatchInfo: /user/username/projects/myproject/foo.d.ts 250 {"watchFile":4} Source file
+sysLog:: /user/username/projects/myproject/foo.d.ts:: Changing watcher to PresentFileSystemEntryWatcher
+FileWatcher:: Triggered with /user/username/projects/myproject/foo.d.ts 0:: WatchInfo: /user/username/projects/myproject/foo.d.ts 250 {"watchFile":4} Source file
+Scheduling update
+Elapsed:: *ms FileWatcher:: Triggered with /user/username/projects/myproject/foo.d.ts 0:: WatchInfo: /user/username/projects/myproject/foo.d.ts 250 {"watchFile":4} Source file
+sysLog:: /user/username/projects/myproject/foo.d.ts:: Changing watcher to PresentFileSystemEntryWatcher
+DirectoryWatcher:: Triggered with /user/username/projects/myproject/foo.d.ts :: WatchInfo: /user/username/projects/myproject 0 {"watchFile":4} Failed Lookup Locations
+Scheduling invalidateFailedLookup, Cancelled earlier one
+Elapsed:: *ms DirectoryWatcher:: Triggered with /user/username/projects/myproject/foo.d.ts :: WatchInfo: /user/username/projects/myproject 0 {"watchFile":4} Failed Lookup Locations
 Synchronizing program
 [12:00:30 AM] File change detected. Starting incremental compilation...
 
@@ -149,14 +160,14 @@ WatchedFiles::
 FsWatches::
 /user/username/projects/myproject/tsconfig.json:
   {"directoryName":"/user/username/projects/myproject/tsconfig.json","inode":10}
-/user/username/projects/myproject/foo.d.ts:
-  {"directoryName":"/user/username/projects/myproject/foo.d.ts","inode":9}
 /user/username/projects/myproject/main.ts:
   {"directoryName":"/user/username/projects/myproject/main.ts","inode":8}
 /user/username/projects/myproject:
   {"directoryName":"/user/username/projects/myproject","inode":7}
 /a/lib/lib.d.ts:
   {"directoryName":"/a/lib/lib.d.ts","inode":3}
+/user/username/projects/myproject/foo.d.ts:
+  {"directoryName":"/user/username/projects/myproject/foo.d.ts","inode":12}
 
 FsWatchesRecursive::
 
@@ -172,12 +183,50 @@ export function foo(): string;
 
 
 Output::
-DirectoryWatcher:: Triggered with /user/username/projects/myproject/foo.d.ts~ :: WatchInfo: /user/username/projects/myproject 0 {"watchFile":4} Failed Lookup Locations
-Elapsed:: *ms DirectoryWatcher:: Triggered with /user/username/projects/myproject/foo.d.ts~ :: WatchInfo: /user/username/projects/myproject 0 {"watchFile":4} Failed Lookup Locations
-DirectoryWatcher:: Triggered with /user/username/projects/myproject/foo.d.ts~ :: WatchInfo: /user/username/projects/myproject 0 {"watchFile":4} Failed Lookup Locations
-Elapsed:: *ms DirectoryWatcher:: Triggered with /user/username/projects/myproject/foo.d.ts~ :: WatchInfo: /user/username/projects/myproject 0 {"watchFile":4} Failed Lookup Locations
+FileWatcher:: Triggered with /user/username/projects/myproject/foo.d.ts 2:: WatchInfo: /user/username/projects/myproject/foo.d.ts 250 {"watchFile":4} Source file
+Scheduling update
+Elapsed:: *ms FileWatcher:: Triggered with /user/username/projects/myproject/foo.d.ts 2:: WatchInfo: /user/username/projects/myproject/foo.d.ts 250 {"watchFile":4} Source file
+sysLog:: /user/username/projects/myproject/foo.d.ts:: Changing watcher to MissingFileSystemEntryWatcher
+DirectoryWatcher:: Triggered with /user/username/projects/myproject/foo.d.ts :: WatchInfo: /user/username/projects/myproject 0 {"watchFile":4} Failed Lookup Locations
+Scheduling invalidateFailedLookup
+Elapsed:: *ms DirectoryWatcher:: Triggered with /user/username/projects/myproject/foo.d.ts :: WatchInfo: /user/username/projects/myproject 0 {"watchFile":4} Failed Lookup Locations
+FileWatcher:: Triggered with /user/username/projects/myproject/foo.d.ts 0:: WatchInfo: /user/username/projects/myproject/foo.d.ts 250 {"watchFile":4} Source file
+Scheduling update
+Elapsed:: *ms FileWatcher:: Triggered with /user/username/projects/myproject/foo.d.ts 0:: WatchInfo: /user/username/projects/myproject/foo.d.ts 250 {"watchFile":4} Source file
+sysLog:: /user/username/projects/myproject/foo.d.ts:: Changing watcher to PresentFileSystemEntryWatcher
+FileWatcher:: Triggered with /user/username/projects/myproject/foo.d.ts 0:: WatchInfo: /user/username/projects/myproject/foo.d.ts 250 {"watchFile":4} Source file
+Scheduling update
+Elapsed:: *ms FileWatcher:: Triggered with /user/username/projects/myproject/foo.d.ts 0:: WatchInfo: /user/username/projects/myproject/foo.d.ts 250 {"watchFile":4} Source file
+sysLog:: /user/username/projects/myproject/foo.d.ts:: Changing watcher to PresentFileSystemEntryWatcher
+DirectoryWatcher:: Triggered with /user/username/projects/myproject/foo.d.ts :: WatchInfo: /user/username/projects/myproject 0 {"watchFile":4} Failed Lookup Locations
+Scheduling invalidateFailedLookup, Cancelled earlier one
+Elapsed:: *ms DirectoryWatcher:: Triggered with /user/username/projects/myproject/foo.d.ts :: WatchInfo: /user/username/projects/myproject 0 {"watchFile":4} Failed Lookup Locations
+Synchronizing program
+[12:00:38 AM] File change detected. Starting incremental compilation...
+
+CreatingProgramWith::
+  roots: ["/user/username/projects/myproject/foo.d.ts","/user/username/projects/myproject/main.ts"]
+  options: {"watch":true,"extendedDiagnostics":true,"configFilePath":"/user/username/projects/myproject/tsconfig.json"}
+[12:00:42 AM] Found 0 errors. Watching for file changes.
+
 
 
+Program root files: ["/user/username/projects/myproject/foo.d.ts","/user/username/projects/myproject/main.ts"]
+Program options: {"watch":true,"extendedDiagnostics":true,"configFilePath":"/user/username/projects/myproject/tsconfig.json"}
+Program structureReused: SafeModules
+Program files::
+/a/lib/lib.d.ts
+/user/username/projects/myproject/foo.d.ts
+/user/username/projects/myproject/main.ts
+
+Semantic diagnostics in builder refreshed for::
+/user/username/projects/myproject/foo.d.ts
+/user/username/projects/myproject/main.ts
+
+Shape signatures in builder refreshed for::
+/user/username/projects/myproject/foo.d.ts (used version)
+/user/username/projects/myproject/main.ts (computed .d.ts)
+
 WatchedFiles::
 /user/username/projects/myproject/node_modules/@types:
   {"fileName":"/user/username/projects/myproject/node_modules/@types","pollingInterval":500}
@@ -185,16 +234,17 @@ WatchedFiles::
 FsWatches::
 /user/username/projects/myproject/tsconfig.json:
   {"directoryName":"/user/username/projects/myproject/tsconfig.json","inode":10}
-/user/username/projects/myproject/foo.d.ts:
-  {"directoryName":"/user/username/projects/myproject/foo.d.ts","inode":9}
 /user/username/projects/myproject/main.ts:
   {"directoryName":"/user/username/projects/myproject/main.ts","inode":8}
 /user/username/projects/myproject:
   {"directoryName":"/user/username/projects/myproject","inode":7}
 /a/lib/lib.d.ts:
   {"directoryName":"/a/lib/lib.d.ts","inode":3}
+/user/username/projects/myproject/foo.d.ts:
+  {"directoryName":"/user/username/projects/myproject/foo.d.ts","inode":13}
 
 FsWatchesRecursive::
 
 exitCode:: ExitStatus.undefined
 
+//// [/user/username/projects/myproject/main.js] file written with same contents Inode:: 11